092

(macropartlcles) (modified CAFD)

1. Scratch test data

2. Rms values

1. Meletis E., Carter W., Hocfntn R., 17th IMS Tech Meeting

3. Rcrcfiawa H., Jdnson P.C., Fed, Research g Development

1. Randrcwa H,, Johnson P.C., Cathodic Arc Plasma Deposition Process

5. Buishdi R,, Schrami R., "TTiln Solid Films 10 (1977)

Diamond Thin Films by Plasma Enhanced Chemical Vapor Deposition - The Emerging Technology for Hard Coatings

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