00

AnodeCiitaJe : N»NiO

0150mA/ctrf □ partial load

4000 6000 Time/h

Current . corrector

R^flP

Fig.3 Deposition of Tungsten (After 10000h operation)

Linear analysis of

Tungsten fa

Fig.3 Deposition of Tungsten (After 10000h operation)

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