Typical CVD Materials and Reactions

A wide variety of materials can be produced by CVD but, as mentioned earlier, only the most important of those related to hard, tribological, and high-temperature coatings and to free-standing structures are reviewed here. The CVD of other materials is described in Ref 1 and 17.

The metals most often deposited by the CVD technique include molybdenum, nickel, rhenium, and tungsten. Molybdenum (Ref 17, 18). The hydrogen reduction of the chloride is most commonly used to deposit molybdenum:

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