References cited in this section

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65. G. Mah, P.S. Mcleod, and D.G. Williams, Characterization of Silver Coatings Deposited from a Hollow Cathode Source, J. Vac. Sci. Technol., Vol 11, 1974, p 663

66. S. Komiya and K. Tsuroka, Thermal Input to Substrate during Deposition by Hollow Cathode Discharge, J.

67. S. Komiya, Physical Vapor Deposition of Thick Cr and Its Carbide and Nitride Films by Hollow-Cathode Discharge, J. Vac. Sci. Technol., Vol 13, 1976, p 520

68. Y.S. Kuo, R.F. Bunshah, and D. Okrent, Hot Hollow Cathode and Its Application in Vacuum Coating: A Concise Review, J. Vac. Sci. Technol. A, Vol 4, 1983, p 397

69. T.C. Tisone and P.D. Cruzan, Low Voltage Triode Sputtering with a Confined Plasma. Part II: Plasma Characteristics and Energy Transport, J. Vac. Sci. Technol., Vol 12 (No. 5), 1975, p 1058

70. D.T. Lason and H.L. Draper, Characterization of the Be-Ag Interfacial Region of Silver Films Deposited onto Beryllium using a Hot Hollow Cathode Discharge, Thin Solid Films, Vol 107, 1983, p 327

71. J.J. Rocca, J.D. Meyer, M.R. Farrell, and G.J. Collins, Glow-Discharge-Created Electron Beams: Cathode Materials Electron Gun Designs and Technological Applications, J. Appl. Phys., Vol 56 (No. 3), 1984, p 790

72. R.L. Boxman and S. Goldsmith, Cathode-Spot Arc Coating: Physics, Deposition and Heating Rates and Some Examples, Surf. Coat. Technol., Vol 33, 1987, p 153

73. R.L. Boxman and S. Goldsmith, Characterization of a 1 kA Vacuum Arc Plasma Gun for Use as a Metal Vapor Deposition Source, Surf. Coat. Technol., Vol 44, 1990, p 1024

74. W.D. Sproul, P.J. Rudnik, K.O. Legg, W.-D. Munz, J. Petrov, and J.E. Greene, Reactive Sputtering in the ABS System, Surf Coat. Technol., Vol 56, 1993, p 179

75. S.M. Rossnagel, Energetic Particle Bombardment of Films during Magnetron Sputtering, J. Vac. Sci. Technol. A, Vol 7 (No. 3), 1989, p 1025

76. D.W. Hoffman, Intrinsic Resputtering--Theory and Experiment, J. Vac. Sci. Technol. A, Vol 8 (No. 5), 1990, p 3707

77. J.P. van der Slice, Ion Energies at the Cathode of a Glow Discharge, Phys. Rev., Vol 131, 1963, p 219

78. J. Machet, P. Saulnier, J. Ezquerra, and J. Gulle, Ion Energy Distribution in Ion Plating, Vacuum, Vol 33, 1983,p 279

79. P. Saulnier, A. Debhi, and J. Machet, Ion Energy Distribution in Triode Ion Plating, Vacuum, Vol 34 (No. 8), 1984, p 765

80. A. Bessaudou, J. Machet, and C. Weismantel, Transport of Evaporated Materials through Support Gas in Conjunction with Ion Plating: I, Thin Solid Films, Vol 149, 1987, p 225

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