References cited in this section

1. H. Randhawa and P.C. Johnson, A Review of Cathodic Arc Plasma Processing. Surf. Coat. Technol., Vol 31, 1987, p 308-318

20. D.M. Sanders and E.A. Pyle, Magnetic Enhancement of Cathodic Arc Deposition, J. Vac. Soc. Tech., Vol A5, 1987, p 2728-2731

21. P.J. Martin et al., Deposition of TiN, TiC, and TiO2 Films by Filtered Arc Evaporation, Surf. Coat. Technol., Vol 49 (No. 1-3), 1991, p 239-243

Ion Implantation

James K. Hirvonen, U.S. Army Research Laboratory; Bruce D. Sartwell, U.S. Naval Research Laboratory

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