References cited in this section

1. W.P. Strickland, "Optical Thin Film Technology: Past, Present and Future," Society of Vacuum Coaters 33rdAnn. Tech. Conf Proc., 1990, p 221

6. H.K. Pulker, Chapter 6, Coatings on Glass, Elsevier, 1984

14. J. Strong, Procedures in Experimental Physics, Prentice-Hall, 1938, p 183

15. K.H. Behrndt, Films of Uniform Thickness from a Point Source, Trans. 9th AVS Symposium, Macmillan, 1962, p 111

128. D.J. Missimer, Removal of Excess Heat in a Vacuum Deposition Operation--An Overview, Society of Vacuum Coaters 33rdAnn. Tech. Conf., 1990, p 269

129. P. Chang, The Relation Between Position and Degree of Step Coverage for a Wafer on a High Speed Planetary Dome, Society of Vacuum Coaters 34th Ann. Tech. Conf., 1991, p 321

130. S. Bosch, Computer-Aided Techniques for Optimization of Layer Thickness Uniformity in Thermal Evaporation Physical Vapor Deposition Chambers for Lense Coating: Enhanced Procedures, J. Vac. Sci. Technol. A, Vol 10 (No. 1), 1992, p 98

131. R. Glang and L.V. Gregor, Generation of Patterns in Thin Films, Chapter 7, Handbook of Thin Film Technology, L.I. Maissel and R. Glang, Ed., McGraw-Hill, 1970

132. I.J. Hodgkinson, Vacuum-Deposited Thin Films with Specific Thickness Profiles, Vacuum, Vol 28, 1978, p 179

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