Deposition of Intermetallic Materials

Intermetallic compounds are formed from relatively electropositive and electronegative metals that chemically bond to form compounds with a specific composition and crystalline structure. Intermetallic films are often formed by depositing the film material on a hot surface so that the adatoms diffuse and react with the surface material, converting it into a silicide, aluminide, or whatever. Very corrosion-resistant intermetallic materials can be formed by codeposition processes at high temperatures. These include the very chemically stable compounds Mo5Ru3 and W3Ru2 (Ref 52) and ZrPt3 and ZrIr3, which are d-orbital bonded intermetallic compounds (Ref 53).

"Amphoteric" metals are those that may gain or lose electrons, that is, act as either an acid (electron donor) or a base (electron acceptor) in chemical reactions.

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