119K Miyoski DH Buckley and T Spalvins J Vac Sci Technol A Vol 3 1985 p 2340 Future Trends

As a surface modification technique, IBAD is attractive because it retains the best features of PVD and ion implantation and eliminates the worst features. The application of IBAD films as wear- and corrosion-resistant coatings for metals and ceramics is just beginning. Because relatively thick coatings (i.e., many microns) of controlled composition and stress are achievable, it is expected that IBAD processing will be accepted into those application areas that currently use conventional PVD techniques without ion assistance.

0 0

Post a comment